JPS63102768U - - Google Patents
Info
- Publication number
- JPS63102768U JPS63102768U JP19655386U JP19655386U JPS63102768U JP S63102768 U JPS63102768 U JP S63102768U JP 19655386 U JP19655386 U JP 19655386U JP 19655386 U JP19655386 U JP 19655386U JP S63102768 U JPS63102768 U JP S63102768U
- Authority
- JP
- Japan
- Prior art keywords
- molecular beam
- beam source
- heater
- cylindrical part
- crucible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002265 prevention Effects 0.000 claims description 2
- 230000005855 radiation Effects 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19655386U JPS63102768U (en]) | 1986-12-19 | 1986-12-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19655386U JPS63102768U (en]) | 1986-12-19 | 1986-12-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63102768U true JPS63102768U (en]) | 1988-07-04 |
Family
ID=31155482
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19655386U Pending JPS63102768U (en]) | 1986-12-19 | 1986-12-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63102768U (en]) |
-
1986
- 1986-12-19 JP JP19655386U patent/JPS63102768U/ja active Pending